MANUFACTURE OF SOI WAFER,申请号JP19910285085-传众专利搜索

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发明名称	MANUFACTURE OF SOI WAFER
摘要
申请公布号	JPH05129171(A)	申请公布日期	1993.05.25
申请号	JP19910285085	申请日期	1991.10.30
申请人	MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP	发明人	SAITO YUICHI
分类号	H01L21/02;H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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