PROCESS FOR PURIFYING NITROGEN TRIFLUORIDE GAS

摘要

A process is provided herein which can effectively decompose dinitrogen difluoride present in nitrogen trifluoride gas to remove it from the gas. This process for purifying the nitrogen trifluoride gas includes the step of heating the nitrogen trifluoride gas containing at least: dinitrogen difluoride as an impurity at a temperature of 150 to 600.degree.C in a metallic vessel. The inner wall of that metallic vessel has been previously lined with a compressed mold, a sintered mold or a fused mold of a solid fluoride, e.g. at least one component which is a of fluoride of metals in Groups IA, IIA and IIIA of the Periodic Table, mixtures thereof and double salts thereof. The compressed mold, the sintered mold or the fused mold has a thickness of 1 to 5 mm.