发明名称 SEMICONDUCTOR ACCELERATION SENSOR INCLUDING OFF AXIS ACCELERATION CANCELLATION
摘要 A semiconductor acceleration sensor has an acceleration sensor element on which gauge resistors are arranged so as to cancel sensed output component corresponding to any acceleration acting in a direction different from an acceleration to be sensed. Consequently, acceleration can be precisely sensed without being influenced by acceleration acting in different
申请公布号 US5212986(A) 申请公布日期 1993.05.25
申请号 US19910725473 申请日期 1991.07.03
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TAKEUCHI, TAKENOBU
分类号 G01P15/12 主分类号 G01P15/12
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