| 摘要 |
<p>PURPOSE:To prevent transmission of vibrations generated in mechanisms to a mask and a wafer in a stepper to be used when the wafer is exposed in a semiconductor manufacturing step. CONSTITUTION:Vibration absorbing members 36-38 are respectively interposed between a stage moving unit 31 for holding a relative position between a mask 14 and a wafer 15 and a moving mechanism 23 for moving the unit 31, a supporting mechanism 34 for supporting the unit 31 from below and a guiding mechanism 35 for guiding the movement of the unit 31.</p> |
