METALLIC PARTICLE DETECTING SENSOR, DETECTION METHOD OF METALLIC PARTICLE, AND METALLIC PARTICLE DETECTOR

摘要

PURPOSE:To estimate and detect even the quantity of metallic particles in a fluid with each particle diameter as a unit with a high precision in a simple constitution by inline by alternately laminating a metallic film and an insulating film and alternately connecting metallic films in parallel and immersing the lamination end face in the fluid where metallic particles exist. CONSTITUTION:A metallic film 1 and an insulating film 2 are alternately laminated. Metallic films 1 are alternately connected in parallel to two lead lines 3a and 3b so that the lamination end face forms a comb-shaped electrode. The lamination end face is immersed in the fluid where metallic particles exist. If a screw plug type metallic particle detecting sensor is constituted as an embodiment, it is enclosed with an insulating body and has only the comb-shaped lamination end face exposed and has only lead lines taken out to the outside. This sensor is screw-engaged with the outer wall of a tube where the fluid flows, and the comb-shaped end face of this sensor faces the upper side of the fluid.