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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05129440(A)
申请公布日期
1993.05.25
申请号
JP19910285829
申请日期
1991.10.31
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
MIZUTANI HIROSHI
分类号
H01L21/203;H01L21/82
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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