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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH05129428(A)
申请公布日期
1993.05.25
申请号
JP19910313384
申请日期
1991.10.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIRAHATA MASAYOSHI
分类号
H01L21/265;H01L21/76
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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