MANUFACTURE OF SPUTTERED THIN FILM,申请号JP19910291611-传众专利搜索

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发明名称	MANUFACTURE OF SPUTTERED THIN FILM
摘要
申请公布号	JPH05128515(A)	申请公布日期	1993.05.25
申请号	JP19910291611	申请日期	1991.11.07
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	NODA KYOJI
分类号	G11B5/85;G11B5/851	主分类号	G11B5/85
代理机构		代理人
主权项
地址

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