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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05129302(A)
申请公布日期
1993.05.25
申请号
JP19910287778
申请日期
1991.11.01
申请人
SEIKO EPSON CORP
发明人
OGUCHI AKEMI
分类号
H01L23/52;H01L21/3205;H01L21/768
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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