发明名称 TRIMMING EQUIPMENT FOR HYBRID INTEGRATED CIRCUIT
摘要 <p>PURPOSE:To materialize a trimming equipment for a hybrid integrated circuit which can trim all the resistors in a hybrid integrated circuit at one time without requiring the modification of arrangements, in the trimming equipment for a hybrid integrated circuit. CONSTITUTION:This device is provided with a probe card 11 which can move horizontally and which has a probe l6 located so as to measure characteristics of the plurality of resistors 17 in one hybrid integrated circuit 13, which are divided into several groups, group by group, and a protection sheet 12 which has a window 18 to correspond to the size of one hybrid integrated circuit 13.</p>
申请公布号 JPH05129116(A) 申请公布日期 1993.05.25
申请号 JP19910286293 申请日期 1991.10.31
申请人 FUJITSU LTD 发明人 SHIMIZU AKIRA;KATSURA YASUFUMI;DOBASHI MASAAKI;YAMAGUCHI ATSUKO
分类号 H01C17/22;H01L21/822;H01L27/04 主分类号 H01C17/22
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