PRODUCTION OF SUBSTRATE FOR OPTICAL MODULATOR

摘要

PURPOSE:To obtain a substrate for an optical modulator which can form an oxide superconductive electrode having good performance. CONSTITUTION:This process for production consists of a stage for forming a Ti layer on a crystalline substrate 1 having an electrooptical effect and forming an optical waveguide 2 by thermally diffusing the Ti layer at a prescribed temp. and a stage for forming an Mg layer or MgO layer 3 on the surface formed with the optical waveguide 2 of the substrate 1, then subjecting this layer to a heat treatment at the temp. lower by at least >=50 deg.C than the temp. in the case of the thermal diffusion of the Ti layer.