| 摘要 |
<p>PURPOSE:To realize correcting technique of a fine pattern having a short time required for correcting and a small residual part by variably setting a diameter of a spot of a particle beam in response to the size of a defective area. CONSTITUTION:A correcting position is specified according to defect information from a central controller 28, and then the size of a defect is determined. Then, the diameter of a spot is selected according to the determination result, and a beam current is varied by operating a voltage of a leading electrode 13 thereby to freely control the diameter of the beam spot. When one time correcting process of one defective part is finished, presence or absence of the residual defect is judged. If there is the residual defect, it is repeated. Thus, fine pattern correcting technique having a short time required for correcting and a small residual part can be realized.</p> |
