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发明名称
ION IMPLANTATION METHOD
摘要
申请公布号
JPH05128994(A)
申请公布日期
1993.05.25
申请号
JP19910288502
申请日期
1991.11.05
申请人
TAKATA KK
发明人
AKIYAMA ISAMU;FUJIHANA TAKANOBU;SATO KOJI
分类号
C23C14/48;H01J37/147;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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