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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05129368(A)
申请公布日期
1993.05.25
申请号
JP19910313417
申请日期
1991.11.01
申请人
NEC CORP
发明人
SUZUKI KATSUHIKO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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