| 摘要 |
A radiation detector 1 has a photoelectric conversion element array 7 having a light receiving unit 3 and a plurality of bonding pads 5; a scintillator layer 8 stacked on the photoelectric conversion element array 7; a resin frame 9 formed on the photoelectric conversion element array 7 so as to pass between the scintillator layer 8 and the bonding pads 5 away from the scintillator layer 8 and the bonding pads 5 and so as to surround the scintillator layer 8; and a protection film 13 covering the scintillator layer 8 and having an outer edge 13a located on the resin frame 9; a first distance D1 between an inner edge E1 of the resin frame 9 and an outer edge E3 of the scintillator layer 8 is shorter than a second distance D2 between an outer edge E2 of the resin frame 9 and an outer edge E4 of the photoelectric conversion element array 7; the outer edge 13a and a groove 9a are processed with a laser beam. |
