摘要 |
PURPOSE:To shield the influence of a reflected ultrasonic wave directed from a base to an oscillator by providing protruding parts protruded from individual electrodes on an insulating partitioning plate provided between oscillators, and bonding the protruding parts to the base to form clearances between the individual electrodes and the base plate. CONSTITUTION:Each oscillator 2 two-dimensionally arranged in a matrix form is charged with polymer layers 3, 4 laminated in two layers in clearances between the respective oscillators. The polymer layer 4 situated on a base 7 side is protruded from a base side electrode 8 having an end part 4a laminated on the oscillator 2. The protruded end part 4a partially has a notch part 4b, and an electric connecting part 10 connected to the base side electrode 8 and a signal line 9 is provided on the notch part 4b. The polymer layer 4 is connected to the base 7 through an adhesive layer 11 on the base 7 side end surface. Therefore, a clearance 19 is formed between the base plate side electrode 8 and the base 7. Since the clearance 9 has an extremely small acoustic impedance, the degree of acoustic coupling between the oscillator and the base 7 is minimized. |