| 摘要 |
PURPOSE:To provide a small-sized mirror base moving device capable of high precision movement by furnishing a quick deformation piezo actuator, which generates the power for moving the mirror base, and a means to sense the amount of mirror base movement optically. CONSTITUTION:A mirror base 4 is coupled with an arm 3 through a mirror base moving device 6, which is fitted with a metal barrel 7. The metal barrel 7 is secured on the arm 3 side, is interposed between the mirror base 4 and arm 3, and accommodates a quick deformation piezo actuator 8 to displace the mirror base 4 vertically and a mirror base movement amount sensing means 9 to sense the amount of mirror base movement. At the piezo actuator 8, a moving body 10, piezo element 11, and inertia body 12 are coupled together, and the moving body 10 is retained on base by the friction force. The sensing means 9 is configured with a photo-sensor 16 and a slitted plate 15 provided with a plurality of slits 14.... Thereby the mirror base can be moved with high precision. |
