| 摘要 |
PURPOSE:To perform inspection by removing a pseudo defect, which is generated when the external appearance of the pattern of a printed board is inspected. CONSTITUTION:An object pattern is scanned with photoelectric conversion scanner 1, and the binary image of the pattern is obtained with a binarization circuit 2. The image pattern of the wire, which is made to be a fine-line with a fine-line forming part 3 is inspected with a fine-line design-rule inspecting part 4, and the defective part is detected. The fact that the defective part is located in the vicinity of a part, which can become a pseudo defect as a feature, is utilized. The mask having a preset size is formed with the position of the defective part obtained from the fine-line desgin-rule inspecting part 4 as the center is a next pseudo-defect removing-mask generating part 5. The mask is made to be a mask region for removing the pseudo defect. In a design-rule inspecting part 6, the ordinary design-rule inspection is performed on the original binary-coded image pattern by using the pseudo-defect removing mask generated in the pseudo-defect removing-mask generating part 5. Thus, the detection of the pseudo mask is prevented, and only the true defect is detected. |
