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发明名称
SEMICONDUCTOR SINGLE CRYSTAL GROWING DEVICE
摘要
申请公布号
JPH05124890(A)
申请公布日期
1993.05.21
申请号
JP19910288088
申请日期
1991.11.01
申请人
KOMATSU ELECTRON METALS CO LTD
发明人
SHIRAISHI YUTAKA
分类号
C30B15/18;C30B15/22;H01L35/14
主分类号
C30B15/18
代理机构
代理人
主权项
地址
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