| 摘要 |
PURPOSE:To calibrate the title instrument by finding one picture element of a CCD element in terms of mum from the finely moved amount of a precise positioning stage for measuring the line width of an image taken with the CCD element by utilizing the stage. CONSTITUTION:By combining a precise positioning stage 1 and line width measuring instrument 4, luminance distribution on a sample 3 is first measured and an arbitrary reference point A is set on the luminance distribution of light irradiating the screen of a CCD element 8. By moving the stage 1 on which the sample 3 is set, the moving amount of the stage 1 is read and the measuring instrument 4 is calibrated by detecting the pitch corresponding to one picture element of a picture sensor 1 from the moved amount of the stage 1 and moved amount of the reference point A proportional to the moved amount of the stage 1. |
