发明名称 ROLLER BEARING FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 PURPOSE:To further improve dust suppressing performance in a device wherein lubricating films of low molecular weight PTFE are disributed in island forms on frictional surfaces of component parts by specifying an area ratio of island portions in respect to a total area of the lubricating film, and mean difference in thickness between the island portions and the portions other than those. CONSTITUTION:A plurality of rolling bodies 3 are arranged between an inner ring 1 and an outer ring 1 of a bearing, and held by holders 4 with a circumferential equal distances. Lubricating films 1a to 3a made of polytetrafuluoroethylene whose mean molecular weight is 5000 or lower are formed on the surface of the inner ring 1, the outer ring 2, and the rolling bodies 3. The lubricating films 1a to 3a are connected to each other by means of thin film portions 6 in their plural island portions 5. An area ratio of the island portions 5 in respect to total area of the lubricating films 1a to 3a is ranged between 10 and 80 percent. A mean film thickness difference (d) between the island portions 5 and the thin film portions 6 other than the island portions is set 0.2mum or more. Dust suppressing performance of the bearing is further improved, accordingly.
申请公布号 JPH05126154(A) 申请公布日期 1993.05.21
申请号 JP19910283407 申请日期 1991.10.30
申请人 NTN CORP 发明人 KONDO HIROMITSU;YAMADA HIROSHI
分类号 F16C33/58;F16C33/30;F16C33/32;F16C33/62 主分类号 F16C33/58
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