| 摘要 |
PURPOSE:To obtain a means for monitoring sintering state of a ceramic substrate quantitatively by obtaining an amount of glass at a pattern part of the ceramic substrate quantitatively. CONSTITUTION:A surface of a ceramic substrate 1 which was sintered is polished and an image which is detected by an optical system consisting of a light source 3, a sensor 4, a polarizer 5, an analyzer 6, lens groups 10a, 10b, and 10c, a half mirror, etc., is processed by an image-processing part 7 for obtaining an amount of glass at a pattern part of the ceramic substrate and using it as sintering state information. |
