Discharge excitation type short pulse laser device.

摘要

A discharge excitation type short pulse laser device comprising a pair of main discharge electrodes (9,24) having a rectangular shape which are disposed in mutual confrontation, with the direction of ther laser beam axis as their longitudinal direction; a dielectric member (12) disposed adjacent one of said main dsicharge electrodes (9,24), an auxiliary electrode (14) provided on the surface of said dielectric member (12) at the opposite side of said one of the main discharge electrodes (9,24) so as to oppose to said main discharge electrode (9,24); a circuit for applying a pulse voltage across said pair of main discharge electrodes (9,24) for applying a voltage across said auxiliary electrode (14) and one of said main discharge electrodes (9,24), and said one of main discharge electrodes (24) is made of an electrically conductive material having a plurality of apertures (25) therein, wherein said plurality of apertures (25) are so arranged in said one of main discharge electrodes that when the centers or the proximity of the centers of apertures (25) adjacent to each other are connected by imaginary linear lines, there are linear lines which are not vertical or parallel to the laser beam axis (35). <IMAGE>