MEASURING-PROBE MANIPULATOR FOR A WAFER-TESTING DEVICE,申请号EP19890110553-传众专利搜索

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发明名称	MEASURING-PROBE MANIPULATOR FOR A WAFER-TESTING DEVICE
摘要
申请公布号	EP0402490(B1)	申请公布日期	1993.05.19
申请号	EP19890110553	申请日期	1989.06.10
申请人	DEUTSCHE ITT INDUSTRIES GMBH	发明人	SCHMIDT, HANS;GUENTER, HELMUT
分类号	H01L21/66;G01R1/067	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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