| 摘要 |
<p>A film thickness controller capable of obtaining the rapidity of predetermined thickness control always even if the operation conditions are changed is disclosed. The film thickness controller includes a die having a mechanism for adjusting and operating a discharge amount along the width direction of film, a thickness gauge for detecting variation of thickness of the film moved with a lag time from a position of the die to a position of the thickness gauge, and adapters 200, 201, 202 and 203 added to an operational calculator 103, a state prediction device 106, a state shifter 105 and an operation amount commander 108 constituting the film thickness controller, respectively, to thereby automatically modify a matrix of a control operation equation to be coincident with the operation conditions with respect to variation of the lag time due to movement of the film and automatically modify a gain matrix of the operational calculator, a gain matrix of a regulator and a matrix in the control operation equation to be coincident with the operation condition with respect to variation of film thickness sensitivity to heater input variation by change of the operation conditions. <IMAGE></p> |
