SILIZIUM-CHIP ZUR VERWENDUNG IN EINEM KRAFTSENSOR,申请号DE19914137624-传众专利搜索

发明名称	SILIZIUM-CHIP ZUR VERWENDUNG IN EINEM KRAFTSENSOR
摘要	Proposed is a silicon chip for use in a force-detection sensor. The chip has circuits (22), piezo-resistive elements (21), an intermediate element (36) and a force-application zone (23). The chip (20) is mounted on a support (38). The piezo-resistive elements (21) are disposed in a zone of high mechanical stress and the circuits (22) in a zone of low mechanical stress. The stress distribution within the chip (20) is modified by, for instance, grooves (122) in the chip.
申请公布号	DE4137624(A1)	申请公布日期	1993.05.19
申请号	DE19914137624	申请日期	1991.11.15
申请人	ROBERT BOSCH GMBH, 7000 STUTTGART, DE	发明人	HERDEN, WERNER, DIPL.-ING. DR., 7016 GERLINGEN, DE;MAREK, JIRI, DIPL.-ING. DR., 7410 REUTLINGEN, DE;WEIBLEN, KURT, ING.(GRAD.), 7430 METZINGEN, DE;BANTIEN, FRANK, DIPL.-PHYS. DR., 7257 DITZINGEN, DE;KUESELL, MATTHIAS, DIPL.-ING., 7015 KORNTAL, DE;SCHMIDT, STEFFEN, DIPL.-ING., 7410 REUTLINGEN, DE
分类号	G01L9/06;G01L1/18;G01L9/00;G01L23/10;G01L23/18	主分类号	G01L9/06
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