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发明名称
PRODUCTION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH05121414(A)
申请公布日期
1993.05.18
申请号
JP19910279396
申请日期
1991.10.25
申请人
NEC CORP
发明人
KOBAYASHI KAZUMI
分类号
H01L21/322;H01L21/324
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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