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发明名称
MANUFACTURE OF SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号
JPH05121763(A)
申请公布日期
1993.05.18
申请号
JP19910284551
申请日期
1991.10.30
申请人
ROHM CO LTD
发明人
NAKAO HIRONOBU
分类号
G11C17/00;H01L21/8247;H01L29/423;H01L29/51;H01L29/788;H01L29/792
主分类号
G11C17/00
代理机构
代理人
主权项
地址
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