发明名称 |
Sawtooth container for semiconductor wafers |
摘要 |
A semiconductor wafer container comprises two identical parts, one forming the bottom and the other forming the lid. Each part has the overall shape of a disk defining a central axis (4) and comprises on a first surface a high number of protruding parts (6) arranged according to a peripheral circle and defined by intersecting plane surfaces which are obliquely slanted with respect to a plane corresponding to the disk. The protruding parts 6 are adjacently joined according to external (9) and internal (10) edges radially oriented with respect to the central axis (4) for forming a saw-tooth ring.
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申请公布号 |
US5211717(A) |
申请公布日期 |
1993.05.18 |
申请号 |
US19910712866 |
申请日期 |
1991.06.11 |
申请人 |
SGS-THOMSON MICROELECTRONICS, S.A. |
发明人 |
SKOURA, GILLES |
分类号 |
B65D43/02;B65D85/00;B65D85/86;H01L21/673 |
主分类号 |
B65D43/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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