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发明名称
LAYOUT PATTERN VERIFYING DEVICE
摘要
申请公布号
JPH05121514(A)
申请公布日期
1993.05.18
申请号
JP19910305480
申请日期
1991.10.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAIRA MASAHITO
分类号
H01L21/66;H01L21/3205;H01L21/82;H01L23/52
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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