| 摘要 |
PURPOSE:To obtain excellent exposure visualization property even for low exposure by incorporating a compd. which produces acid by exposure, org. dye and halogen compd. having a specified skelton as a visualizing agent. CONSTITUTION:This compsn. contains a quinone diazide compd., alkali-soluble resin, compd. which produces acid by exposure, org. dye and halogen compd. expressed by formula. In formula, A is a hydrocarbon ring, R<1> and R<2> are hydrogen atoms, halogen atoms, or halogenated alkyl groups, and at least one of these is a halogen atom or halogenated alkyl group. In this case, the amt. of quinone diazide compd. is 5-60wt.% of the whole photosensitive compd. except for solvents. Further, the alkali-soluble resin is such a resin that can be used as a binder. The org. dye changes its color tone by interaction with photolysis products produced by exposure. |
