| 摘要 |
PURPOSE:To provide magnetic material which allows the same saturation magnetic flux density as Fe16N2 or above and provide its production. CONSTITUTION:Reactive sputtering is performed in the gas atmosphere which contains helium gas and nitrogen element containing gas using pure iron as a target. Thus, high saturation magnetic flux density magnetic material, which allows saturation magnetic flux density of 2.2T or more and that contains 1-15 atomic % of nitrogen element having iron as the major ingredient is produced. |
