| 摘要 |
<p>PURPOSE:To quickly align the direction of orientation flats of a plurality of semiconductor wafers in the same direction. CONSTITUTION:At a plurality of wafers 18, axial lines of the individual wafers are directed in a direction which is parallel to a notch alignment roller 14. While the individual wafers 18 are being held so as to be capable of being turned and moved in up-and-down direction, the notch alignment roller 14 is turned in a state that outer circumferences of the individual wafers 18 have been brought into contact with a notch coupling part 14a at the notch alignment roller 14 from the upper part. Thereby, the individual wafers 18 are turned simultaneously when they come into rolling contact with the notch coupling part 14a. However, when notches 19 are turned up to the notch coupling part 14a, both are coupled and the wafers 18 cannot be tuned any more.</p> |
