| 摘要 |
<p>PURPOSE:To improve visibility of an alignment mark formed on a substrate and to make position alignment of a mask pattern of each layer be executed precisely. CONSTITUTION:An opening 5 is formed virtually in the center of an alignment mark 3 of a second layer and thereby a light is made to strike on a contour part of an alignment mark 1 on a substrate 4 even when the alignment mark 3 of the second layer is fitted for position alignment in the alignment mark 1 on the substrate 4.</p> |
