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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05121387(A)
申请公布日期
1993.05.18
申请号
JP19910278027
申请日期
1991.10.24
申请人
TOSHIBA CORP
发明人
OZAWA YOSHIO;YAMABE KIKUO;KOBAYASHI HIDEYUKI;TERASAKA KUNIHIRO
分类号
C30B33/02;H01L21/304
主分类号
C30B33/02
代理机构
代理人
主权项
地址
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