| 摘要 |
PURPOSE:To prevent dew condensation accompanying cooling and high frequency from leaking. CONSTITUTION:A cover 10, made of low thermal conductivity resin, such as vinyl chloride resin, is of cylindrical shape with a bottom. The cover 10 is provided so that it will cover the bottom side of a bottom electrode 3 and a refrigerant circulation pipe 8 with a gap between the cover and them. The cover 10 is fixed to a flange of the bottom part of a connecting material 5. In addition, the surface of the cover 10 has a conductor layer 10a formed by, for example, electroless nickel plating.
|
