| 摘要 |
<p>PURPOSE:To surely and easily perform the insertion operation of semiconductor wafer into a carrier for semiconductor wafer use. CONSTITUTION:A carrier is featured in the following manner: a plurality of grooves 4 for semiconductor water insertion use are formed, so as to be faced with each other, in individual inner faces of sidewalls 2, 3 which are faced with each other; the grooves 4 on both inner faces are divided into a plurality of regions; and groove discrimination marks 11 whose shape, size and/or color are different form those of adjacent regions are put on individual guards 7, 8 near groove numbers 9 at the individual grooves 4 in the individual regions. Thereby, it is possible to prevent the erroneous insertion operation of a semiconductor wafer 5 into the carrier 1, the efficiency of the insertion operation of the semiconductor wafer 5 is enhanced, and the fatigue of an operator can be reduced.</p> |
