| 摘要 |
PURPOSE:To furnish controlling equipment of positioning of an exposure apparatus which can set an optimum loop gain of a position control system as occasion demands, and can position a stage at a target position accurately in a short time even when mechanical conditions change. CONSTITUTION:Controlling equipment of positioning of an exposure apparatus is provided with a first calculating means 8 which calculates the average value or the median of the amount of positional slippage in each prescribed time, a second calculating means 9 which calculates a difference between the minimum and maximum values of the amount of positional slippage in each prescribed time and a gain setting means 11 which sets a loop gain of a signal generated for controlling a driving means 3 and corresponding to the amount of positional slippage, on the basis of the average value or the median and the difference which are calculated, and the optimum loop gain is always set irrespective of change in mechanical conditions. |
