DRY ETCHING METHOD,申请号JP19910279599-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH05121366(A)	申请公布日期	1993.05.18
申请号	JP19910279599	申请日期	1991.10.25
申请人	OKI ELECTRIC IND CO LTD	发明人	MIHASHI TOSHIRO;KANAMORI JUN;IKEGAMI NAOKATSU
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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