发明名称 MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To furnish a manufacturing method of a semiconductor element which makes it possible to discriminate a rejected product in a characteristic test and to maintain excellent visibility of a wafer number, without giving a mark of rejection to a marking part to which a wafer number such as a production number is marked. CONSTITUTION:On the occasion when an aluminum wiring process is executed in a manufacturing method of a semiconductor element wherein the semiconductor element is formed on a wafer 11 by a technique of photolithography, a marking part 12 of a wafer number such as a production number given on the wafer 11 is covered with a mask 16 so that the part covered with this mask 16 may not be exposed.
申请公布号 JPH05121286(A) 申请公布日期 1993.05.18
申请号 JP19910306907 申请日期 1991.10.26
申请人 MITSUMI ELECTRIC CO LTD 发明人 KATO AKIHIKO;SAKAI TSUKASA;OGAWA TAKASHI
分类号 H01L21/30;H01L21/027 主分类号 H01L21/30
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