Raw batches for ceramic substrates, substrates produced from the raw batches, and production process of the substrates

摘要

This invention is concerned with ceramic substrates for multilayer interconnection. This invention is also concerned with a raw batch for ceramic substrates which require a calcining temperature as low as 1,000 DEG C. or lower upon their production, are low in dielectric constant and have a coefficient of thermal expansion close to that of silicon and also with a process for the production of the substrates. This invention makes use of a raw batch which permits the use of a low resistance conductor such as Ag-Pd, Ag, Au or Cu and also the production of substrates by low-temperature calcination. The raw batch contains borosilicate silicate glass powder, and aluminum borate powder and at a weight ratio of 40-80 percent to 20-60 percent. The raw batch can additionally contain one or more specific oxides in particular proportions.