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发明名称
WAFER SUPPORT DEVICE
摘要
申请公布号
JPH05121518(A)
申请公布日期
1993.05.18
申请号
JP19910190644
申请日期
1991.07.04
申请人
EBARA CORP
发明人
KIMURA NORIO;OGAMINO HIROAKI;HIROSE MASAYOSHI
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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