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发明名称
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号
JPH05121303(A)
申请公布日期
1993.05.18
申请号
JP19920094269
申请日期
1992.04.14
申请人
TOSHIBA CORP
发明人
YAMAGUCHI TOSHIO;ABE TAKAYUKI;YAMAZAKI SATOSHI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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