| 摘要 |
PURPOSE:To provide an oscillation sensor with high accuracy and being capable of being downsized. CONSTITUTION:This senser detects oscillations by the use of piezoelectric resistance element. The sensor is provided with a rod-shaped silicone oscillation element 11, low resistance parts 12 which are arranged at the central portion of the oscillation element while both end sides of the oscillation element 11 are separated to each other thereby, and a gauge part 16 detecting the oscillations provided at both ends of the oscillation element 11 and given to the oscillation element 11 as the change of piezo-resistance. |
