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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH05117847(A)
申请公布日期
1993.05.14
申请号
JP19910307111
申请日期
1991.10.28
申请人
UBE IND LTD
发明人
MATSUBARA KAKUEI;KOYANAGI TAKESHI;FUJII TAKAMITSU;KIMURA TAKAYUKI;YAMAMOTO KAZUTSURA
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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