PREPARATION OF ARTICLE BY CHEMICAL VAPOR DEPOSITION AND SUPPORTING MEMBER USED IN THE PREPARATION

摘要

An improved method of producing a diamond tube by chemical vapor deposition and a hollow support mandrel used therein. The method comprises depositing a diamond film 20 on an outer side of the hollow mandrel 14 by the CVD process. The mandrel is then etched away by subjecting an inner side of the mandrel to the etching action. It was unexpectedly discovered that the etch time is drastically reduced by using the hollow mandrels.