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发明名称
METHOD FOR FORMING N-TYPE AND P-TYPE DIAMOND
摘要
申请公布号
JPH05117089(A)
申请公布日期
1993.05.14
申请号
JP19910306804
申请日期
1991.10.25
申请人
SUMITOMO ELECTRIC IND LTD
发明人
NISHIBAYASHI YOSHIKI;SHIKADA SHINICHI;FUJIMORI NAOHARU
分类号
C30B29/04;C30B31/06;H01L21/225
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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