HEAT TREATING DEVICE,申请号JP19910307196-传众专利搜索

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法人/股东/高管

发明名称	HEAT TREATING DEVICE
摘要
申请公布号	JPH05117865(A)	申请公布日期	1993.05.14
申请号	JP19910307196	申请日期	1991.10.28
申请人	TOKYO ELECTRON SAGAMI LTD	发明人	OKASE WATARU
分类号	C23C16/46;H01L21/205;H01L21/22;H01L21/31	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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