发明名称 |
Sputter coating of poly:methyl:methacrylate] substrate - using hydrocarbon additive gas to increase coating adhesion |
摘要 |
In the adherent coating of polymethyl methacrylate substrates by cathodic sputtering, the sputtering gas (pref. Ar) is mixed with a hydrocarbon-contg. additive gas (pref. methane or an alcohol-contg. gas) which affects the substrate surface during sputtering to promote intimate bonding of the sputtered cathode material (pref. a silvery metal, esp. Al) to the substrate. The sputtering gas pref. contains max. 50 vol.% additive gas. The sputtering vessel housing forms the anode and is made of an electrically conductive material, pref. copper. USE/ADVANTAGE - Useful in the mfr. of optical data carriers such as compact discs or video discs. It allows adherent metallisation of acrylic glass substrates in a single step, without requiring special substrate pretreatment, by a quasi-continuous prodn. process.
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申请公布号 |
DE4136986(A1) |
申请公布日期 |
1993.05.13 |
申请号 |
DE19914136986 |
申请日期 |
1991.11.11 |
申请人 |
LEYBOLD AG, 6450 HANAU, DE |
发明人 |
FRITSCHE, WOLF-ECKART, 8752 KLEINOSTHEIM, DE |
分类号 |
C23C14/20;C23C14/34 |
主分类号 |
C23C14/20 |
代理机构 |
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