Method of and device for the measurement of an electric signal in an electronic component.

摘要

A description is given of a method and a device for the sampling of an electric signal (SI) in an electronic component (5) by means of a radiation beam (11) and also of special embodiments of an electro-optic measurement device (1) in which this method can be used. The electro-optic sensor element (8) is provided with an electrically conductive tip (37) at one side (33) and with an electrode (27, 27') at the other side (25), so that an absolute and calibrated measurement is possible. The measurement beam is high-frequency pulsed with a pulse (LP) per period of the test signal (SI), the pulse series being low-frequency modulated and the pulses exhibiting, relative to the test signal, a constant phase relationship during the first half periods of the modulation signal (SM) and a varying phase relationship during the second half periods, so that accurate and reliable measurement is possible. <IMAGE> <IMAGE>